I am an undergraduate student at the University of Alberta, doing research for
one of my professors this summer in the field of MEMS.  I was wondering if
anyone knew of any chemicals that would etch a thin film of TiNi (aka. NITINOL
or SMA material), preferentially anisotropically, that is present on a silicon
substrate.  Any information in this area would be greatly appreciated, and I
can be reached at [email protected] or [email protected] and I also
check this discussion forum often so you can reply there also.


Thanking you in advance,

James Brown

Faculty of Engineering
University of Alberta
Edmonton, Alberta
Canada