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MEMSnet Home: MEMS-Talk: Photodefinable polyimide
Photodefinable polyimide
2001-05-13
Yiping Lin
Photodefinable polyimide
Yiping Lin
2001-05-13
Hi:

I look for solution about insulating layer. Using phtodefinable polyimide is one
possibility and can reduce the steps of processing. However, I had bad
experience with spin-on glasses on cuing temerature, and polyimide also needs to
be cure at several temperatures. Do you have experiences with using polyimide as
insulating layer? If you like to share with me, please send an email to

[email protected]

Thanks.

Yiping Lin
Department of Physics and Astronomy
SUNY at Stony Brook, Stony Brook, NY 11794-3800
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