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MEMSnet Home: MEMS-Talk: Etching Au and Ti layer from GaAs
Etching Au and Ti layer from GaAs
2001-05-15
Souvick Mitra
Etching Au and Ti layer from GaAs
Souvick Mitra
2001-05-15
Dear Sir/Madam,

        Could you please tell me the best etchants for removing a 40,000A Au
and a 3000 A Ti layer from GaAs layer.

Thanks,

Souvick Mitra

George Mason University
ECE Dept.
Fairfax, VA.


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