Hi, there,

Any one has experince etching BK7 glass? What I need is 3 micron wide and 4
micron deep, do I need to use RIE? What kind of plasma and what kind of mask
should I use? Appreciate your help!


Jizuo Zou

Microelectronic Research Center
University of Texas at Austin
Austin, Texas 78758

Email: [email protected]