MCNC is pleased to announce the introduction of electronics integration for
MEMS--SmartMUMPs. SmartMUMPs is the newest component of the DARPA-supported
MEMS Infrastructure program at MCNC. SmartMUMPS leverages the surface
micromachining technology of MUMPs (the Multi-User MEMS Processes) and the flip
chip attachment process available at MCNC, to integrate circuit technology with
MEMS.

SmartMUMPs provides electronics through the use of a flip chip attached ASIC
designed specifically for surface micromachining MEMS applications. A survey of
the MEMS community identified electronic functional blocks of importance to the
community for inclusion in the first ASIC design. Based upon this survey,
ECOSYS- 1, the first Electromechanical Control System ASIC, was designed with
the following modules: buffer amplifier, transimpedance amplifier, correlated
double sampling integrator, current reference, clock generator and pulse
generator. Some of the current and voltage references and control signals are
set off-chip to provide user flexibility and programmability. The modules are
connected to a standard pad frame that is mirrored on the MUMPs chip for flip
chip attach. All fabrication is handled by MCNC and is transparent to the user.
After flip chip attachment, the joined pair is placed in a standard package
(64-pin DIP) and shipped to the user. The cost of SmartMUMPs is $2300, which
includes the full 1Jcm x 1Jcm MUMPs die location, HF release, 10 ECOSYS chips,
flip chip attachment of 10 MUMPs chips with 10 ECOSYS chips, and packaging of
all 10 joined pairs. SmartMUMPs is offered in conjunction with all surface
micromachining MUMPs runs. The next run, MUMPs13, has a design deadline of May
13, 1996. Other runs in 1996 have deadlines of July 15, Sept. 16 and Nov. 11.

Users interested in SmartMUMPs can obtain a copy of the SmartMUMPs Design
Handbook which covers the design rules and guidelines for designing a MUMPs
chip and successfully integrating it with ECOSYS. The handbook is available
online at

http://mems.mcnc.org/smumps/smart.html

Reservations can also be made through the online reservations systems on the
webpage. If you would like a hardcopy or have other questions, please contact
Dave Koester at 919-248-1493 or send email to [email protected].