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MEMSnet Home: MEMS-Talk: does anyone have a solid procedure to deposit parylene and etch
does anyone have a solid procedure to deposit parylene and etch
2001-05-30
John Conklin
does anyone have a solid procedure to deposit parylene and etch
John Conklin
2001-05-30
              parylene?
Hello All,

    I am in need of a good procedure to deposit
parylene onto silicon, glass, and kapton substrates.
I also need instructions on how to chemically etch
parylene as well.  Thanks.

John "Conk" Conklin


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