A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Ohmic contact to silicon
Ohmic contact to silicon
2001-06-04
Geoffrey Nunes
Ohmic contact to silicon
Geoffrey Nunes
2001-06-04
I need to make ohmic contact to the back side of an n-type (~10 ohm-cm)
silicon wafer.  I do not have a convenient way to remove the native oxide
and I do not have the facilities to anneal the wafer.

Can I just evaporate ~200 nm of Au?

I have found comments in the literature about the use of an indium-gallium
alloy, but can find no papers that actually describe technical details like
the alloy ratio, need for an anneal, etc.

Any help would be appreciated.


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Tanner EDA by Mentor Graphics
The Branford Group
Mentor Graphics Corporation