Does anyone out there provide or know of a service that can provide
the following etch:

DRIE 10 microns of Si with near vertical side walls and stop a Pyrex
wafer?  Basically, the device is a thin Si wafer anodically bonded to a
Pyrex wafer that needs to be released.    There would also be Al in a
sealed  cavity between the Pyrex and Si, but the etch would not "see"
the Al, just  the Pyrex.

The places that I have checked so far will not let pyrex in their machines.

Regards,

Mark

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Mark Sheplak
Assistant Professor
Interdisciplinary Microsystems Group
Department of Aerospace Engineering,
Mechanics, & Engineering Science
227 Engineering Building
PO Box 116250
University of Florida
Gainesville, FL 32611-6250

(352) 392-3983
(352) 392-7303 FAX
[email protected]
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