>Hi !
>
> Could someone please instruct me as to where I might find some
>information regarding the Electrostatic Bonding of Silicon Wafers...
>
> Thanks,
>
> Michel Rosa. Ph.D Candidate Griffith University (Australia)
>
Dear Michel
Two papers that I have written maybe of interest, they are:
"Selection of glass, anodic bonding conditions & material compatibility for
silicon-glass capacitive sensor"
T. Rogers, J.Kowal
Published in Sensors and Actuators A 46-47 (1995) 113-120
AND
"Considerations of anodic bonding for capacitive type silicon/glass sensor
fabrication"
Tony Rogers
Published in J. Micromech. Microeng. 2 (1992) 164-166.
Regards
Tony Rogers
Applied Microengineering Ltd
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