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MEMSnet Home: MEMS-Talk: Ultra-thick SOG layers
Ultra-thick SOG layers
2001-07-31
David Chang-Yen
Ultra-thick SOG layers
David Chang-Yen
2001-07-31
Hello all,
I am attempting to produce 50um x 50um optical waveguides from silca-based spin-
on glass (SOG). I have access to a thermosetting polysiloxane glass resin from
Techneglas, GR651L, but I would like to know what are the best spinning and
baking processes to yield a 50um thick glass layer.
---
David Chang-Yen
Institute for Micromanufacturing
Louisiana Tech University
Ruston, LA 71270









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