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MEMSnet Home: MEMS-Talk: Thick Photoresist
Thick Photoresist
1996-05-15
Ken Westra
Thick Photoresist
Ken Westra
1996-05-15
In one of our processes, we are using STR 1110 photoresist (a thick positive
photresist from Shipley). We are using layers about 20 um thick. The problem is
that Shipley no longer makes this product ( as of Jan 1) and we are looking for
a replacement product. I have heard that Shipley might have a replacement
product and that AZ has a similar product, however since I'm not Intel, I can't
seem to get any information from the sales reps. I was wondering if anyone was
using a product or knew of a product that could be useful to us.

Thanks,

Ken Westra
Staff Scientist- Alberta Microelectronic Centre
[email protected]


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