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MEMSnet Home: MEMS-Talk: stress from gold sputtering or evaporation
stress from gold sputtering or evaporation
2001-08-07
Thomas Wendling
stress from gold sputtering or evaporation
Thomas Wendling
2001-08-07
Hi:
Does anybody have data for intrinsic and thermal stress from sputtering or
evaporating gold on silicon?
I would appreciate the data input or literature references.
Thanks
TPHFW


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