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MEMSnet Home: MEMS-Talk: Glass etching
Glass etching
2001-08-13
Adriele
Glass etching
Adriele
2001-08-13
I'm having problem on etching a normal borosilicate glass with HF(conc. 4:1 not
buffered).
The etching process comes irregular and strip off the resist after 25mins I run
the process.
Is there anyone that have a better idea on how to etch it? Someone suggest to
etch the glass using FIB or Ion beam etching technique. Is there anyone that
have experience on that.

Any help  would be appreciated.

Thanks

Adriele
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