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MEMSnet Home: MEMS-Talk: TMAH back etching allignrmrnt
TMAH back etching allignrmrnt
2001-08-17
MUHAMMAD ASLAM
TMAH back etching allignrmrnt
MUHAMMAD ASLAM
2001-08-17
after my process of deposition of metals on silicon wafer, i want to go for bulk
micromachining process ( TMAH), but hot allign the back side of wafer so that
the etching area is exactly under the top side pattren. I do not have the
facility of double sided mask alligner.


M. Aslam
[email protected]

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