Richard,

There are several locations that do thick Polysilicon for DI products.
One that I know of is Sipex Corporation in San Jose, CA as last year
they were doing a 750 um (yes- 750 microns) polysilicon layer over oxide
on my 700um Float Zone wafers for a DI high efficiency solar product.
They did thousands for my product and others. They are very aware of the
stresses since they do this process and do insitsu process adjustments
to monitor and adjust for the wafer warp with small fluctuation in the
temperatures during the process.

OF the local thin film houses, 1um seems to be the limit of their
capabilities.

I cant seem to find my contact phone number, but if you are interested,
I will spend a little time searching for it for you.

Regards,
Ken

"Haigh, Richard" wrote:
>
> I am looking for a university or company that has the facilities to deposit
> a polysilicon layer with a thickness of 10 microns or greater. The
> polysilicon will need to be deposited onto 4" i.e. 100 mm diameter Si
> wafers. The wafers will be coated with a nitride or oxide layer before
> deposition of the polysilicon - adhesion to this might be an issue. Finally,
> the organisation that conducts this work will need to have established
> processes for deposition of this thickness of polysilicon - so that stress
> at these thicknesses is not an issue.
>
> Many thanks
>
> Richard Haigh
>
> Contact:
>
> [email protected]
>
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> mems-talk mailing list
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> http://fab.mems-exchange.org/mailman/listinfo/mems-talk

--
Ken Smith

Kmbh Associates

4968 Charter Road
Rocklin, CA  95765  USA
510-714-5055 Efax- 510 217 4421 or 561 658 6136

High Purity Float Zone and Specialty CZ Silicon  for Power, IR and
Mirror Optics, Optoelectronics, MEMS, SOI, and other Semiconductor
applications. Service in SOI, Polishing SSP and DSP.