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MEMSnet Home: MEMS-Talk: cleaning after KOH etching
cleaning after KOH etching
2001-08-20
shankar
cleaning after KOH etching
shankar
2001-08-20
could somebody please tell me the steps that should be followed for
cleaning the anisotropically etched wafer with KOH. i need to etch
V-grooves in (100) silicon wafer using KOH.


        THE MAN WHO DOES NOT READ GOOD BOOKS HAS NO ADVANTAGE
                        OVER THE MAN WHO CANNOT READ.........
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        Ravi Shankar
        Engineer VLSI-FAB,                    Phone: 91-172-254401
        Semiconductor Complex Ltd.,                  Ext: 576,552.
        Phase-VIII, S.A.S Nagar,                Fax:91-172-253378
        Punjab. Pin:160059.                E-mail: [email protected]

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