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MEMSnet Home: MEMS-Talk: Etch Rates
Etch Rates
2001-08-21
Bradley, Joe A.
2001-08-22
zhuxiaorui
Etch Rates
zhuxiaorui
2001-08-22
although there are many sides being etched,only use the etch rate along the
vertical depth of the wafter,depth/rate.
or select any of directions where you may know the etch rate to do.

            zhuxiaorui
            [email protected]



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