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MEMSnet Home: MEMS-Talk: Anisotropic silicon etch question
Anisotropic silicon etch question
2001-08-20
Postlethwaite, Tim
Ultrathin Chips: Call for paper and invitation
2001-08-22
Erik Jung (2 parts)
2001-08-20
Biao Li
2001-08-22
zhuxiaorui
Anisotropic silicon etch question
zhuxiaorui
2001-08-22
     i don't know if the wafter was processed by removing impurities.
i think the amount of the impurities would affect the etch rate.


            zhuxiaorui
            [email protected]



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