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MEMSnet Home: MEMS-Talk: Nickel thin film deposition on silicon dioxide
Nickel thin film deposition on silicon dioxide
2001-08-27
kanishka biswas
Nickel thin film deposition on silicon dioxide
kanishka biswas
2001-08-27
hi! I am working in the Microelectronics Centre of IIT Kharagpur, India,
in a project where we are developing a Micromachined Flowsensor. I need
help regarding nickel thin film deposition on silicon dioxide.If any
body has any data in this regard please kindly help me.We are using a
1.0 micron thick SiO2 layer to deposit nickel.Please kindly send data
regarding nickel adhesion quality on silicon dioxde and what type of
filament and which metal filament can we use.
Thanks With Regards,
Kanishka Biswas

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