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MEMSnet Home: MEMS-Talk: film deposition
film deposition
2001-08-27
Steven Gross
2001-08-27
Robert Okojie
2001-08-27
Kenneth Smith
film deposition
Steven Gross
2001-08-27
Hello,
Does anybody know who has experience with deposition of oxide/nitride/oxide
for stress compensation? Thanx
- Steve
Steven J. Gross

Graduate Researcher
The Pennsylvania State University
Department of Electrical Engineering
121 Electrical Engineering East
University Park PA
16802

Fax     (814) 865 2798
Office (814) 865 1267
Home   (814) 235 9685

http://www.personal.psu.edu/users/s/j/sjg12/


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