Steve:

Contact T.P. Ma at Yale.  I don't have his address on me right now.  His
group does JVD-ONO (Jet vapor deposited ONO).

-Robert.

At 05:50 PM 08/27/2001 -0400, Steven Gross wrote:
>Hello,
>Does anybody know who has experience with deposition of oxide/nitride/oxide
>for stress compensation? Thanx
>- Steve
>Steven J. Gross
>
>Graduate Researcher
>The Pennsylvania State University
>Department of Electrical Engineering
>121 Electrical Engineering East
>University Park PA
>16802
>
>Fax    (814) 865 2798
>Office (814) 865 1267
>Home   (814) 235 9685
>
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>
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Robert S. Okojie, Ph.D.
NASA-Glenn Research Center
Sensors and Electronics Branch
21000 Brookpark Road, M/S 77-1
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