Hi,

Can anybody provide me with detail information on chemical etchants
efficient in patterning of PZT thin films (deposition by sol gel on Si
substrate +Pt/Ti electrodes, thickness < 1µm) or let me know where can I
obtain such informations on the website.
Thank you in advance !
Best regards,
Christophe Gorecki
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Dr. Christophe Gorecki, CNRS Senior Researcher
Laboratoire d'Optique P.M. Duffieux, Faculte des Sciences et Techniques
16 route de Gray, 25030 Besancon, France
Tel: +33-3-81666607, fax: +33-3-81666423
e-mail: [email protected]