I am currently battling SU-8 2015. I am working with Au and am having trouble
getting the photoresist to stick to the gold. I have tried aggressive cleaning
measures, prolonged bake times, and stepped exposures with little improvement.
Any suggestions?
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DARA RUGGIERO
HARRIS CORPORATION
Microsystems Technology Group
[email protected]
phone - (321) 727-5765
fax - (321) 729-3554
Government Communications Systems Division
PO Box 37, Mail Stop 1-9841
Melbourne, FL USA 32902-0037
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