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MEMSnet Home: MEMS-Talk: SU-8 Adhesion
SU-8 Adhesion
2001-08-28
Ruggiero, Dara
SU-8 Adhesion
Ruggiero, Dara
2001-08-28
I am currently battling SU-8 2015.  I am working with Au and am having trouble
getting the photoresist to stick to the gold.  I have tried aggressive cleaning
measures, prolonged bake times, and stepped exposures with little improvement.
Any suggestions?

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DARA RUGGIERO

HARRIS  CORPORATION
Microsystems Technology Group

[email protected]
phone - (321) 727-5765
fax     -  (321) 729-3554

Government Communications Systems Division
PO Box 37, Mail Stop 1-9841
Melbourne, FL USA 32902-0037
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