why there will be a 54.7 degrees when wet etching a silicon wafer with KOH
Oscar Hui
2001-08-28
Dear Sir,
hi................could you explain it to me why there will be a 54.7
degrees when wet etching a silicon wafer with KOH. is that it relate to
the planar orientation of plane 111, plane 110 and plan 100.
please give me an explanation in detail.
thanks heartily.