Robert,

Did you try Si/Pyrex/Si triple stack anodic bonding using a pyrex wafer
instead of sputtering pyrex?

More info is at http://www.sensorsmag.com/articles/1298/sil1298/main.shtml


Scroll down to "Advanced Wafer Bonding"

Regards,
Helge


                -----Original Message-----
                From:   Robert D White [mailto:[email protected]]
                Sent:   Wednesday, August 29, 2001 3:09 PM
                To:     [email protected]
                Subject:        [mems-talk] Sputtering Pyrex

                MEMS Researchers,

                I am considering anondic bonding of two silicon wafers by
first
                sputtering pyrex onto one wafer.
                Does anyone know of a group who will sputter pyrex?

                Thanks,

                Robert White
                University of Michigan


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