Dear Dr. Berney,

we are a MEMS-based silicon wafer foundry providing DRIE services on 100 and
150 mm wafers using our Alcatel 601E and STS-ICP etchers. We do have a 6
years experience on DRIE of silicon and will probably be able to meet your
requirements. Please let me know your specs in order to send you a quotation.

You can also find information about our services on our homepage at
www.microfab.de

Best regards,

Joern Koblitz

*********************************
Joern Koblitz
Managing Director
microFAB Bremen GmbH
Fahrenheitstr. 1
28359 Bremen, Germany
fon +49 (0) 421 2208 272
fax +49 (0) 421 2208 275
[email protected]
http://www.microfab.de
*********************************

-------- Original Message --------
Subject: [mems-talk] DRIE (4-SEP-2001 17:55)
From:    [email protected]
To:      [email protected]

> Hi all,
>
> I am looking for a foundry that can perform deep reactive ion etching
> (375 micron etch in 525 or 750 micron silicon wafers).  Ideally I am
> looking for somewhere that can process four inch wafers.  Depending on
> clean room constraints, I can supply patterned nitride on silicon wafers
> for further processing or discuss our full process requirements with the
> relevant fab.  Initially I am looking for a smalll number of wafers
> (5-10) to prove a concept.
>
> thanks,
>
> Dr. Helen Berney
> National Microelectronics Research Centre, LeeMaltings,Cork, Ireland.
> Tel +353-21-4904010 Fax +353-21-4270271 Email [email protected]
>
>
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To: [email protected]
    [email protected]