Hello,

Do you know where to find examples, how to simulate MEMs structures in 3D with
Ansys?

I'm looking an information about: how to calculate capasitance of cantilever,
when voltage is applied?

How to calculate cantilever beam frequency, when voltage is applied? And
everything in that area.

I have just started to study these things, and every help is needed.

Thanks,

--
Kimmo Varjonen TTKK

Tampere University of Technology
Institute of Electronics
  Mail: [email protected]