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MEMSnet Home: MEMS-Talk: KOH
KOH
2001-09-04
jafar j babaei
2001-09-05
zhuxiaorui
KOH
zhuxiaorui
2001-09-05
Hi,my friend:

uniformity is related with etch composition(KOH+propanol), etchant
concentration(higher,45%), etch temperature(lower), etch agitation, and the
presence and absence of surfactants.

            zhuxiaorui
            [email protected]



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