On Wed 05 Sep 2001 14:41, Varjonen Kimmo wrote:
> Do you know where to find examples, how to simulate MEMs structures in 3D
> with Ansys?

Look at http://dmtwww.epfl.ch/ims/micsys/ANSYS/tp/index.html

Also the ANSYS 5.7 documentation has some examples on MEMS. You can view it
online at http://www1.ansys.com/customer/content/documentation/57/index.html

Hope this helps,

--
                    Antonio Luque Estepa
          Escuela Superior de Ingenieros de Sevilla
                     [email protected]
                 http://woody.us.es/~aluque