Does anyone knows of a supplier for visual inspection tools to check
photolitho backside alignment accuracy on 4/6" wafers. I know one supplier of
such systems, Electronic Vision in Austria, but their tools are rather
expensive ($70,000). Any idea?

Joern

*********************************
Joern Koblitz
microFAB Bremen GmbH
Fahrenheitstr. 1
28359 Bremen, Germany
fon +49 (0) 421 2208 272
fax +49 (0) 421 2208 275
[email protected]
http://www.microfab.de
*********************************