Dear Sir,



hi...........i am Oscar, a year 2 student from Mechanical department,
who wants to know more about the chemical PYROCATECHOL (CATECHOL).
. since it is very toxic, but i have to use it in my project(actually, i
am doing my FYP.................to etch a 90 degrees cavity on silicon
wafer..............).
and the composition of etchant is EDP"B"  (75ml ethylenediamine, 24ml
water, 12g pyrocatechol).

it is because the b.p. of pyrocatechol is 120 'C, but i have to keep the
etchant at 115'C. it is very dangerious.
so, i wanna know any advice from you, what kind of setup i should ues.
besides, any good web, which i can find those equipment?


thanks

best wishes

oscar