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MEMSnet Home: MEMS-Talk: piezo or other positioners
native aluminum oxide vs. oxide plasma etch
2001-09-06
Oberhammer Joachim
piezo or other positioners
2001-09-07
Jeremy Rutman
piezo or other positioners
Jeremy Rutman
2001-09-07
I would like to put a beam supported by one end upon a support of variable
height.
Is it possible to deposit and use piezo elements as positioners in an
otherwise silicon
based environment? Any links for examples or basic mems techniques
appreciated.
Thanks




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