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MEMSnet Home: MEMS-Talk: Wafer dicing techniques
Wafer dicing techniques
2001-09-12
Assaf Matia
Wafer dicing techniques
Assaf Matia
2001-09-12
Hi,

I am interested in any info you might have on 4"/6" wafer dicing techniques.
Very gentle MEMS membranes are located on the wafer, therefor the dicing
must be very precise and smooth.

Thanks

Assaf Matia

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