Hi All,

When trying to achieve metal adhesion to polymeric materials it is best to
modify the surface so that the metal has something to stick to besides C-F
or C-H bonded carbon backbones.  Oxygen plasma is a good way to go.  But
keep in mind that when you oxidize the surface you raise the energy of that
surface, so if the material has a measure of mobility then the surface
groups you are creating will tend to become "submerged" rapidly within the
film.  In other words, many polymeric materials will "heal" over time, more
or less rapidly depending on the stiffness of the matrix.  So you may need
to work quickly for best results.

Thor Osborn, Ph.D.
Manager, MEMS Technology Development
Microvision, Inc.
19910 North Creek Parkway
P.O. Box 3008
Bothell, WA 98011
USA

(425) 415-6725


-----Original Message-----
From: Pancham R. Patel [mailto:[email protected]]
Sent: Friday, December 14, 2001 9:10 AM
To: [email protected]
Cc: Pancham R. Patel
Subject: [mems-talk] Metal adhesion on Teflon AF 2400


Hello All,

I am presently interested in patterning chromium on a Teflon AF 2400 film.
But, I am having problems adhering chromium metal on these films.

My procedure:
1. Evaporate 1500 A of chromium on a Teflon Film.
2. Spin 1818 and then expose it to 405nm UV light.
3. Remove chrome using CEN-300 chrome-etchant.
4. Remove unexposed 1818 using 1112A stripper.

The whole chromium metal film gets removed in the stripper.

Has anybody encountered this problem?
Which metal adheres better to Teflon?

Thanks in advance,
Regards,
Pancham R. Patel.
Research Assistant.
University of Illinois, Chicago.

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