Hi Felix,

The short answer to your question is:

D0 = 386 micron^2/hr
EA = 0.78 eV

The long answer is that these values will probably change in the presence of
dopants, and might also be different at the low temperatures that you describe.
Most of the data
on the diffusivity of water in SiO2 is due to research on the thermal oxidation
of silicon, which is usually performed at temperatures above 700C.

The above data come from chapter 3 of Richard Jaeger's "Introduction to
Microelectronic Fabrication." You may also want to check out the Landolt-
Bornstein series, which is
an excellent source for this type of data.

Best of luck with your work!

-Craig McGray


[email protected] wrote:

>
> From: "Felix Lu" 
> To: 
> Date: Sun, 16 Sep 2001 22:15:20 -0700
> Subject: [mems-talk] diffusivity of water in silicon dioxide
>
> Hi,
>
>    Does anyone know the diffusivity of water in SiO2( at temperatures of =
> 100-300C)? This seems like it should be an easy thing to find...but I'm =
> having trouble find it. any suggestions or comments on where to look =
> would also be appreciated.=20
>
> Felix
> [email protected]