A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: help on furnace process
help on furnace process
2001-09-17
Ken Kwon
help on furnace process
Ken Kwon
2001-09-17
Hi,

Can anybody please give me an information regarding a TCA cleaning of
furnace?  Temperature, Gas flow/ratio should be used (use O2 or O2 with H2),
minimum time required for a sufficient cleaning, etc.

Hope to hear from you soon *crosses his fingers*

Ken
[email protected]



_________________________________________________________________
Get your FREE download of MSN Explorer at http://explorer.msn.com/intl.asp



reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
MEMStaff Inc.
Mentor Graphics Corporation
University Wafer