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MEMSnet Home: MEMS-Talk: SU8 removal
SU8 removal
2001-09-19
Browning, R (Richard)
SU8 removal
Browning, R (Richard)
2001-09-19
We are removing SU8 from copper structures
High temperatures are causing a differential expansion problem.
Does anyone have a method of removing SU8 at room temperature which does not
remove the copper as well

Thank You
Richard Browning

Phone: + (0)1235-44-6383    Fax: + (0)1235-44-5848
Rutherford Appleton Laboratory
Chilton, Didcot, Oxfordshire, UK OX11 0QX



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