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MEMSnet Home: MEMS-Talk: Information wanted on PZT etching and adhesion
Information wanted on PZT etching and adhesion
1996-05-29
Qun Li
Information wanted on PZT etching and adhesion
Qun Li
1996-05-29
Dear members:

We are trying to make an ultrasonic transducer using PZT as the piezoelectric
material. If anyone happens to know the etching techniques of PZT as well as
the adhesion techniques of PZT to Si substrate, please give some suggestion.
Any resource of publications on these issues is also urgently needed.

Thank you very much.

Yours sincerely,

Qun LI
Dept. of Biomedical Engineering
Louisiana Tech University
Ruston, LA 71272


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