RE: mems-talk small holes in glassLaser etching is a good way for 100-200um
holes. If your glass is annealed , it is better. I have used laser to drilling
holes on glass.The result is good. Try this way.
----- Original Message -----
From: Reed Gleason
To: [email protected]
Cc: [email protected]
Sent: Tuesday, September 25, 2001 3:23 PM
Subject: [mems-talk] RE: mems-talk small holes in glass
For a few holes, you could try a wire of the desired diameter in a small drill
press, diamond abrasive, and a support for the glass that controls the force to
small values, such as setting the glass on urethane foam.
Dear MEMS colleagues,
As a part of my thesis I am interested in making several small =
diameter holes (100-200 micron) in a thin layer of glass (400-500 =
micron), along a 20 mm line. Then I need to fill the holes with gold or =
any other metal.
I would like to know if anyone knows any methods to drill or etch =
those holes in glass ( Pyrex, BK-7, CdTe, BaF2 or any other material =
that allows transmission in the visible and IR wavelengths as well).
I would appreciate if anyone can tell me of a manufacturer that can make =
these holes.=20
=20
P.S. I choose glass because of its relative high thermal isolation =
property.
Thank you in advance,
Danny Klein
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