Hi li shifeng,
Physik Instrumente (PI), Germany are the leading producers of PZT.
They have offices in US also.You can call them at 508-832-3456 (Auburn,
MA).Also for futher info check thier website www.polytecpi.com.
Regards
Popuri Rajsekhar.
>From: [email protected]
>Reply-To: [email protected]
>To: [email protected]
>Subject: mems-talk digest, Vol 1 #53 - 6 msgs
>Date: Tue, 25 Sep 2001 12:01:03 -0400
>
>Send mems-talk mailing list submissions to
> [email protected]
>
>To subscribe or unsubscribe via the World Wide Web, visit
> http://fab.mems-exchange.org/mailman/listinfo/mems-talk
>or, via email, send a message with subject or body 'help' to
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>
>You can reach the person managing the list at
> [email protected]
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>When replying, please edit your Subject line so it is more specific
>than "Re: Contents of mems-talk digest..."
>
>
>Today's Topics:
>
> 1. RE: material for sacrificial layer (Mark Shaw)
> 2. Re: Density of Polysilicon (shankar)
> 3. young's modulus,compliance coeff, poission ratio ofSi in
><110>direction (anant narain)
> 4. Making small diameter holes in glass (Debjyoti Banerjee)
> 5. PZT SUPPLIER (li shifeng)
> 6. Re: vendor for 12inch Pt and NiCr target (oray orkun cellek)
>
>--__--__--
>
>Message: 1
>Date: Mon, 24 Sep 2001 12:20:08 -0400
>From: "Mark Shaw"
>To:
>Subject: [mems-talk] RE: material for sacrificial layer
>
>Dear Prem Pal,
>
>There are several candidates that could solve your problems and fit your
>needs....I will mention a couple that we at MicroChem are aware of and
>manufacture....
>
>PMGI - PMGI is a polymer that lends itself very nicely to this
>application...It is spin coatable to a wide variety of Film
>Thicknesses....It planarises very easily under controlled bake
>conditions....Requires the use of Standard Resist processing
>techniques..And can be removed easily by using standard photoresist
>developers or removers....
>
>LOR - Is a PMGI based resist layer, generally used in a bi-layer scheme
>as a Lift-Off Resist....It's dissolution rate in aqueous developers is
>inherently faster than PMGI and may be better suited as a sacrificial
>layer....Again this product is available in a wide variety of film
>thicknesses....This product has been used successfully as a sacrificial
>layer beneath SU-8 in MEMS applications.....Requires the use of Standard
>Resist processing techniques..And can be removed easily by using
>standard photoresist developers or removers....
>
>I hope this is of use to you....If you need any more information please
>contact me....
>
>Mark Shaw
>Product Development & Applications Manager
>MicroChem Corp.
>1254 Chestnut Street,
>Newton, MA. 02464
>=20
>Tel : 617-965-5511 ext.308
>Fax : 617-965-5818
>=20
>
>
>
>-----Original Message-----
>From: [email protected]
>[mailto:[email protected]]
>Sent: Monday, September 24, 2001 12:01 PM
>To: [email protected]
>Subject: mems-talk digest, Vol 1 #52 - 6 msgs
>
>
>Send mems-talk mailing list submissions to
> [email protected]
>
>To subscribe or unsubscribe via the World Wide Web, visit
> http://fab.mems-exchange.org/mailman/listinfo/mems-talk
>or, via email, send a message with subject or body 'help' to
> [email protected]
>
>You can reach the person managing the list at
> [email protected]
>
>When replying, please edit your Subject line so it is more specific
>than "Re: Contents of mems-talk digest..."
>
>
>Today's Topics:
>
> 1. BCB and bonding ([email protected])
> 2. material for sacrifacial layer (Prem Pal)
> 3. Density of Polysilicon (Aitor Endemano)
> 4. vendor for 12inch Pt and NiCr target (Biao Li)
> 5. Re: replacement for strain gauges ([email protected])
> 6. Making small diameter holes in glass (Danny Klein)
>
>-- __--__--
>
>Message: 1
>From:
>To: [email protected]
>Date: Fri, 21 Sep 2001 18:15:41 CEST
>Subject: [mems-talk] BCB and bonding
>
>Dear All,
>
>we are looking for information about bonding with BCB.
>Does anybody know how BCB works with high temperature? Is it
>thermosensitive? Does its adhesion change with temperature?
>Let us know
>D.Doria
>
>
>
>-- __--__--
>
>Message: 2
>From: "Prem Pal"
>To: [email protected]
>Date: Fri, 21 Sep 2001 16:43:42 +0000
>Subject: [mems-talk] material for sacrifacial layer
>
>
>
hello friends
>
I am trying to find out the material which can be spin coated on
>surface topography and can be planerise by using CMP or some other means
>and finally can be used as a sacrifacial layer in surface micromachining
>technology. any kind of information about this material would be
>highly appreciated.
Get your FREE download of MSN
>Explorer at href=3D'http://go.msn.com/bql/hmtag_itl_EN.asp'>http://explorer.msn.coma
> >
>
>
>-- __--__--
>
>Message: 3
>From: Aitor Endemano
>Reply-To: [email protected]
>To: [email protected]
>Date: Fri, 21 Sep 2001 18:57:43 +0100 (GMT Daylight Time)
>Subject: [mems-talk] Density of Polysilicon
>
>Dear colleagues,
>Does anybody know the typical value for the density of the polysilicon.
>Cheers,
>
>Aitor Endemano Isasi
>
>
>-------------------------------------------------------------
>Aitor Endemano Isasi - PhD Student
>Dpt. of Computing & Electrical Eng.
>Heriot Watt University - Riccarton
>Edinburgh EH14 4AS - SCOTLAND
>Tlf: +44 (0)131 449 5111 ext.4159
>Fax: +44 (0)131 451 3327
>E-mail: [email protected]
>
>
>
>-- __--__--
>
>Message: 4
>From: Biao Li
>To: "'[email protected]'"
>Date: Fri, 21 Sep 2001 20:58:24 -0400
>Subject: [mems-talk] vendor for 12inch Pt and NiCr target
>
>Hello,
>=20
>we need 12-inch Pt and NiCr targets for MRC sputtering system. any
>information about vendors are appreciated.
>
>Biao Li
>
>
>-- __--__--
>
>Message: 5
>Date: Mon, 24 Sep 2001 10:19:40 +1200
>From: [email protected]
>Organization: Industrial Research Limited
>To: Conrad Trevelyan
>CC: [email protected]
>Subject: Re: [mems-talk] replacement for strain gauges
>
>
>If you're interested in measuring the strain on the surface of a part,
>in the
>same way as you would with a strain gage, then the only MEMS device that
>I'm
>aware of is the BiAST (BiAxial Strain Transducer) being developed by
>Sarcos
>(http://www.sarcos.com/memsspec_uast.html).
>
>It is actually better described as a micro-extensometer rather than a
>strain
>gage, but with a gage length of around 10 millimeters, its output should
>be
>similar to that of a small strain gage. The most interesting features
>are:
>
>* practical resolution of the order of 1 microstrain.
>* onboard A/D conversion, so that the sensor actually communicates
>digitally
>with the data acquisition system with the obvious consequences for
>noise.
>* potentially reusable, as the MEMS device package is attached by
>something like
>screws to the stems of 3 mounting pads which are bonded to the surface
>whose
>strain is to be measured. This is important because initially, at least,
>these
>sensors will be considerably more expensive than normal strain gages.
>
>These devices will hopefully become available in the next few months. If
>you'd
>like some more information, I can forward a couple of papers in PDF
>format.
>
>There are of course non-MEMS alternatives to electrical strain gages
>based on
>fibre optics.=20
>
>If you learn of any other MEMS-based strain measurement devices, please
>let us
>know.
>
>-- Emilio
>
>---------------------------------------------------------------------
>Dr Emilio P. Calius
>Research Engineer: Smart Materials and Structures
>Industrial Research Limited
>PO Box 2225, Auckland, New Zealand
>Ph: +64 9 303 4116, Fax: +64 9 307 0618
>
>
>-- __--__--
>
>Message: 6
>From: "Danny Klein"
>To:
>Date: Mon, 24 Sep 2001 14:34:17 +0200
>Subject: [mems-talk] Making small diameter holes in glass
>
>This is a multi-part message in MIME format.
>
>------=3D_NextPart_000_0007_01C14505.FD98FF20
>Content-Type: text/plain;
> charset=3D"iso-8859-1"
>Content-Transfer-Encoding: quoted-printable
>
>Dear MEMS colleagues,
>
> As a part of my thesis I am interested in making several small =3D
>diameter holes (100-200 micron) in a thin layer of glass (400-500 =3D
>micron), along a 20 mm line. Then I need to fill the holes with gold or
>=3D
>any other metal.
> I would like to know if anyone knows any methods to drill or etch =
>=3D
>those holes in glass ( Pyrex, BK-7, CdTe, BaF2 or any other material =3D
>that allows transmission in the visible and IR wavelengths as well).
>I would appreciate if anyone can tell me of a manufacturer that can make
>=3D
>these holes.=3D20
> =3D20
>P.S. I choose glass because of its relative high thermal isolation =3D
>property.
>
>Thank you in advance,
>
>Danny Klein
>
>-----------------------------------------------------
>
>Danny Klein
>Faculty of Mechanical Engineering
>Technion, Israel Institute of Technology
>Haifa, 32000
>Israel
>
>Tel: 972-4-8292946
>Email: [email protected]
>
>----------------------------------------------------
>
>
>------=3D_NextPart_000_0007_01C14505.FD98FF20
>Content-Type: text/html;
> charset=3D"iso-8859-1"
>Content-Transfer-Encoding: quoted-printable
>
>
>
>charset=3D3Diso-8859-1">
>
>
>
>
>
Dear MEMS colleagues,
>
>
As a part of my thesis I =
>=3D
>am=3D20
>interested in making several small diameter holes (100-200 micron) in a
>=3D
>thin=3D20
>layer of glass (400-500 micron), along a 20 mm line. Then I need to fill
>=3D
>the=3D20
>holes with gold or any other metal.
>
I would like to know =3D
>if anyone=3D20
>knows any methods to drill or etch those holes in glass ( Pyrex, =
>=3D
>BK-7,=3D20
>CdTe, BaF2 or any other material that allows transmission in the visible
>=3D
>and=3D20
>IR wavelengths as well).
>
I would appreciate if anyone can tell =
>me
>=3D
>of a=3D20
>manufacturer that can make these holes.
>
>
P.S. I choose glass because of =
>=3D
>its relative=3D20
>high thermal isolation property.
>
>------=3D_NextPart_000_0007_01C14505.FD98FF20--
>
>
>
>
>-- __--__--
>
>_______________________________________________
>mems-talk mailing list
>[email protected]
>http://fab.mems-exchange.org/mailman/listinfo/mems-talk
>
>
>End of mems-talk Digest
>
>
>--__--__--
>
>Message: 2
>Date: Mon, 24 Sep 2001 22:35:54 -0700 (PDT)
>From: shankar
>cc: [email protected]
>Subject: Re: [mems-talk] Density of Polysilicon
>
>this website might help you.....
>http://www-bsac.eecs.berkeley.edu/polysilicon.html
>regds,
>Ravi Shankar
>Semiconductor complex ltd,
>India.
>
>
>
>On Fri, 21 Sep 2001, Aitor Endemano wrote:
>
> > Date: Fri, 21 Sep 2001 18:57:43 +0100 (GMT Daylight Time)
> > From: Aitor Endemano
> > To: [email protected]
> > Subject: [mems-talk] Density of Polysilicon
> >
> > Dear colleagues,
> > Does anybody know the typical value for the density of the polysilicon.
> > Cheers,
> >
> > Aitor Endemano Isasi
> >
> >
> > -------------------------------------------------------------
> > Aitor Endemano Isasi - PhD Student
> > Dpt. of Computing & Electrical Eng.
> > Heriot Watt University - Riccarton
> > Edinburgh EH14 4AS - SCOTLAND
> > Tlf: +44 (0)131 449 5111 ext.4159
> > Fax: +44 (0)131 451 3327
> > E-mail: [email protected]
> >
> >
> > _______________________________________________
> > mems-talk mailing list
> > [email protected]
> > To unsubscribe or change your list options, use:
> > http://fab.mems-exchange.org/mailman/listinfo/mems-talk
> >
>
>
>
>--__--__--
>
>Message: 3
>Date: Mon, 24 Sep 2001 10:13:44 -0700 (PDT)
>From: anant narain
>To: [email protected]
>Subject: [mems-talk] young's modulus,compliance coeff, poission ratio ofSi
>in <110>direction
>
>hi!
>
>i am student doing M.Tech (microelectronics and vlsi
>design) from I.I.T.Kharagpur,India.
>i am presently working in MEMS and developing a
>piezoresistive accelerometer.
>
>i wish to know the elastic constt. of Si in <110>
>direction specifically the Young's modulus,poisson's
>ratio, and compliance coeff. along <110>
>
>thanks,
>great regards,
>anant narain
>
>__________________________________________________
>Do You Yahoo!?
>Get email alerts & NEW webcam video instant messaging with Yahoo!
>Messenger. http://im.yahoo.com
>
>
>--__--__--
>
>Message: 4
>Date: Mon, 24 Sep 2001 12:44:33 -0700
>From: Debjyoti Banerjee
>Organization: Coventor Inc.
>To: [email protected]
>Subject: [mems-talk] Making small diameter holes in glass
>
>This is a multi-part message in MIME format.
>--------------68B53AF76C6A02F4CD929875
>Content-Type: text/plain; charset=us-ascii
>Content-Transfer-Encoding: 7bit
>
>You may want to try Lamda-Physik (http://www.lambdaphysik.com/). They do
>laser beam machining on Silicon and Glass with hole diameters down to 1um.
>In the web page - look under Service & Support / Applications Lab
>Capabilities. Hope this helps.
>
>Debjyoti.
>
>[email protected] wrote:
>
> > Message: 6
> > From: "Danny Klein"
> > To:
> > Date: Mon, 24 Sep 2001 14:34:17 +0200
> > Subject: [mems-talk] Making small diameter holes in glass
> >
> > This is a multi-part message in MIME format.
> >
> > ------=_NextPart_000_0007_01C14505.FD98FF20
> > Content-Type: text/plain;
> > charset="iso-8859-1"
> > Content-Transfer-Encoding: quoted-printable
> >
> > Dear MEMS colleagues,
> >
> > As a part of my thesis I am interested in making several small =
> > diameter holes (100-200 micron) in a thin layer of glass (400-500 =
> > micron), along a 20 mm line. Then I need to fill the holes with gold or
>=
> > any other metal.
> > I would like to know if anyone knows any methods to drill or etch =
> > those holes in glass ( Pyrex, BK-7, CdTe, BaF2 or any other material =
> > that allows transmission in the visible and IR wavelengths as well).
> > I would appreciate if anyone can tell me of a manufacturer that can make
>=
> > these holes.=20
> > =20
> > P.S. I choose glass because of its relative high thermal isolation =
> > property.
> >
> > Thank you in advance,
> >
> > Danny Klein
> >
> > -----------------------------------------------------
> >
> > Danny Klein
> > Faculty of Mechanical Engineering
> > Technion, Israel Institute of Technology
> > Haifa, 32000
> > Israel
> >
> > Tel: 972-4-8292946
> > Email: [email protected]
> >
> > ----------------------------------------------------
> >
> > ------=_NextPart_000_0007_01C14505.FD98FF20
> > Content-Type: text/html;
> > charset="iso-8859-1"
> > Content-Transfer-Encoding: quoted-printable
> >
> >
> >
> > > charset=3Diso-8859-1">
> >
> >
> >
> >
> >
Dear MEMS colleagues,
> >
> >
As a part of my thesis I =
> > am=20
> > interested in making several small diameter holes (100-200 micron) in a
>=
> > thin=20
> > layer of glass (400-500 micron), along a 20 mm line. Then I need to fill
>=
> > the=20
> > holes with gold or any other metal.
> >
I would like to know =
> > if anyone=20
> > knows any methods to drill or etch those holes in glass ( Pyrex, =
> > BK-7,=20
> > CdTe, BaF2 or any other material that allows transmission in the visible
>=
> > and=20
> > IR wavelengths as well).
> >
I would appreciate if anyone can tell me
>=
> > of a=20
> > manufacturer that can make these holes.
> >
> >
P.S. I choose glass because of =
> > its relative=20
> > high thermal isolation property.
I want to some pieces of PZT actuator.please give me some information
>about PZT supplier, in particular in US.
>
>
thanks
>
shifeng Li
Get your FREE
>download of MSN Explorer at href='http://go.msn.com/bql/hmtag_itl_EN.asp'>http://explorer.msn.com
>
>
>--__--__--
>
>Message: 6
>From: "oray orkun cellek"
>To: "Biao Li" ,
>
>Subject: Re: [mems-talk] vendor for 12inch Pt and NiCr target
>Date: Tue, 25 Sep 2001 10:08:48 +0300
>
>I heard that Kurt-Lesker can produce custom targets for sputtering systems
>.
>(www.lesker.com)
>
>Oray Orkun CELLEK
>[email protected]
>
>----- Original Message -----
>From: Biao Li
>To:
>Sent: Saturday, September 22, 2001 3:58 AM
>Subject: [mems-talk] vendor for 12inch Pt and NiCr target
>
>
> > Hello,
> >
> > we need 12-inch Pt and NiCr targets for MRC sputtering system. any
> > information about vendors are appreciated.
> >
> > Biao Li
> >
> > _______________________________________________
> > mems-talk mailing list
> > [email protected]
> > To unsubscribe or change your list options, use:
> > http://fab.mems-exchange.org/mailman/listinfo/mems-talk
> >
>
>
>
>--__--__--
>
>_______________________________________________
>mems-talk mailing list
>[email protected]
>http://fab.mems-exchange.org/mailman/listinfo/mems-talk
>
>
>End of mems-talk Digest
_________________________________________________________________
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