A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: TMAH etching and GaAs
TMAH etching and GaAs
2001-09-28
[email protected]
TMAH etching and GaAs
[email protected]
2001-09-28
I have to apologize in advance, I'm not doing MEMS, but it seems
there's a lot of information on TMAH here, so I'd thought I'd ask.

I'm trying to find an wet etch process that will etch polysilicon, but
not GaAs, and TMAH was suggested.

I tried this out, and it's not working the way I expected.  It doesn't
seem to etch the GaAs, but it doesn't seem to etch the polysilicon
either.  I tried 2% TMAH at 80C as well as 12%.  The layer was pretty
thin (500A), undoped e-beam evaporated silicon.


Also, as more of a trivia question, will TMAH attack AlGaAs?  I've
read about adding Si to prevent etching Aluminum, but it's not clear
to me that it will prevent the etching of AlGaAs.

Thanks in advance for any advice.
--
Pack my box with five dozen liquor jugs.
Brian Perkins                                [email protected]

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMStaff Inc.
Nano-Master, Inc.
Harrick Plasma, Inc.
Process Variations in Microsystems Manufacturing