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MEMSnet Home: MEMS-Talk: Diffusivity and Solubility of metals in Silicon
Diffusivity and Solubility of metals in Silicon
2001-10-02
Ali Khalil
Diffusivity and Solubility of metals in Silicon
Ali Khalil
2001-10-02
Hello,

I would very much appreciate if anybody could provide me with the
following:

Diffusivity (cm2/s) and solubility  of  Pd, Fe and Cu in monocrystalline
Si

I am mostly interested in values at a temperatures above 700 C.

I would greatly appreciate your help if or you can recommend a
reference, web site or
any info.

Thank you

Ali Khalil

reply
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