Hello Ali,

You will find values for the diffusivity of Fe and Cu in single-crystal silicon
in
the Landolt-Bornstein reference in section 6.1.4.1. I'm afraid I can't help with
Pd.

Best of luck with your work!

-Craig McGray


[email protected] wrote:

> Date: Wed, 03 Oct 2001 12:02:59 +1000
> From: Ali Khalil 
> Reply-To: [email protected]
> Organization: ANU
> To: [email protected]
> Subject: [mems-talk] Diffusivity and Solubility of metals in Silicon
>
> Hello,
>
> I would very much appreciate if anybody could provide me with the
> following:
>
> Diffusivity (cm2/s) and solubility  of  Pd, Fe and Cu in monocrystalline
> Si
>
> I am mostly interested in values at a temperatures above 700 C.
>
> I would greatly appreciate your help if or you can recommend a
> reference, web site or
> any info.
>
> Thank you
>
> Ali Khalil