hi !

i am developing a piezoresistive accelerometer.
the resistances (boron doped)will be along <110>
directions for which i have calculated the values of
piezocoefficients as :
pi_11 = 71.8
pi_12 = -66.3
pi_44 = 7.7

i need to verify, if these values for p-Si(100)along
<110> are correct.
thanks,
regards,
anant narain
student, M.Tech(microelectronics and vlsi design)
A-121, V.S.Hall of residence,
I.I.T. Kharagpur,
India
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