Hi All,
I am trying to find a machine (or experience) that maskless exposure (direct
write like a laser-beam)
a photoresist (senstive: around near UV: 365nm, dosis 20-3000mJ/cm2, e.g.
AZ-resist) coated wafer.
Thanks!
Jens
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Jens Tuchscheerer
Clondiag Chip Technologies GmbH
Lvbstedterstr. 105
07749 Jena
Tel.: +49 3641 59470
Fax.: +49 3641 594720
Mail: [email protected]
Web: www.clondiag.com
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