I have seen several references to "Pad etch" in
micromachining literature - specifically relating to
removal of a sacrificial oxide layer.

I have asked several chamical suppliers and checked
in several references to  no avail (I believe it
is a specialisat formulation (HF?) by Ashland, but
can find no reference to it on their MSDS?).

Can anyone help me with what it actually is & who
supplies it?

Best regards,

Karen Smith
MST consultant
Coventry, UK

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