ask for the parameters of RIE for SiO2,Si and Si3N4
ÂÞÔª
2001-10-15
Dear members:
We will use RIE to etch SiO2,Si and Si3N4. If you know the
basic parameters of RIE for them, please tell me ASAP.
Thank you very much!
Long for your kindly response.
Yours Sincerely:LuoYuan
Oct.15,2001
Email:[email protected]
