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MEMSnet Home: MEMS-Talk: Quartz etched by HNO3 at 80 C?
Quartz etched by HNO3 at 80 C?
2001-10-18
Orjan Vallin
Quartz etched by HNO3 at 80 C?
Orjan Vallin
2001-10-18
I put this question to all of you yesterday, but unfortunately the
temperature was ten times to high. Here is the correct version:

I have experienced a roughening of the single crystalline quartz surface
when cleaning the sample in 80 C concentrated nitric acid. Have you seen
the same thing, or have you some references to HNO3 crystalline quartz
cleaning?

Answers and hints on this subject would be most appreciated,

Orjan Vallin

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