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MEMSnet Home: MEMS-Talk: Silicon Fusion Bond Strength
Silicon Fusion Bond Strength
1996-06-05
Jarlath McEntee
Silicon Fusion Bond Strength
Jarlath McEntee
1996-06-05
Dear Group,

I want to find some information on the strength of Silicon Fusion bonds between
silicon wafers. In particular I am interested in the strength of the bond in
direct tension, in shear, and in bending. Most of the information I can find in
the litrature presents information on the surface energy of the bond. Any
papers presenting actual fracture strenghts of bonds gives fracture stresses in
the range of 5 to 15 MPa. This seems low for an interatomic bond. Any
clarifications available?


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