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MEMSnet Home: MEMS-Talk: MEMS switch Sacrificial Layer!
MEMS switch Sacrificial Layer!
2001-11-01
yazan hijazi
MEMS switch Sacrificial Layer!
yazan hijazi
2001-11-01
Hello everyone,
My name is Yazan and I'm in the process of developing
a fabrication process for a capacitive MEMS switch!
The switch membrane is made of gold, and rests on a
YBCO Coplanar Waveguide on a LaAlO substrate.
I need to have a 3 micrometer airgap between the
membrane and the CPW, could anyone please tell me if I
can use PMGI as a sacrificial layer and also where I
can get specs and  pricing information about that?!
Any suggestions or helpful info. will be greatly
appreciated!
Thanking you in Advance
Yazan Hijazi
Future AeroSpace Science and Technology Center for
Space Cryoelectronics @ FIU Miami,Fl.
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